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Thickness dependence of stress-induced leakage currents in silicon oxide
Runnion, E.F., Gladstone, S.M., Scott, R.S., Jr., Dumin, D.J., Lie, L., Mitros, J.C.Volume:
44
Year:
1997
Language:
english
Pages:
9
DOI:
10.1109/16.585556
File:
PDF, 150 KB
english, 1997