Overestimation of oxide defects density in large test...

Overestimation of oxide defects density in large test capacitors due to plasma processing

Hyungcheol Shin, Minkyu Je, Chenming Hu
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Volume:
44
Year:
1997
Language:
english
Pages:
3
DOI:
10.1109/16.622615
File:
PDF, 81 KB
english, 1997
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