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The design and characterization of nonoverlapping super...

The design and characterization of nonoverlapping super self-aligned BiCMOS technology

Chiu, T.-Y., Chin, G.M., Lau, M.Y., Hanson, R.C., Morris, M.D., Lee, K.F., Liu, M.T.Y., Voschenkov, A.M., Swartz, R.G., Archer, V.D., III, Finegan, S.N., Feuer, M.D.
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Volume:
38
Year:
1991
Language:
english
Pages:
10
DOI:
10.1109/16.65748
File:
PDF, 1.02 MB
english, 1991
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