The impact of metal-1 plasma processing-induced hot carrier injection on the characteristics and reliability of n-MOSFETs
El Hassan, M.G., Awadelkarim, O.O., Werking, J.D.Volume:
45
Year:
1998
Language:
english
Pages:
6
DOI:
10.1109/16.662791
File:
PDF, 145 KB
english, 1998