Measurement of MOSFET substrate dopant profile via inversion layer-to-substrate capacitance
Chiang, C.Y.-T., Che Ta Clement Hsu, Yeow, Y.T., Ghodsi, R.Volume:
45
Year:
1998
Language:
english
Pages:
5
DOI:
10.1109/16.704372
File:
PDF, 144 KB
english, 1998