Influence of process-induced stress on device characteristics and its impact on scaled device performance
Smeys, P., Griffin, P.B., Rek, Z.U., De Wolf, I., Saraswat, K.C.Volume:
46
Year:
1999
Language:
english
Pages:
8
DOI:
10.1109/16.766893
File:
PDF, 615 KB
english, 1999