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A high fill-factor infrared bolometer using micromachined multilevel electrothermal structures
Hyung-Kew Lee, Jun-Bo Yoon, Euisik Yoon, Sang-Baek Ju, Yoon-Joong Yong, Wook Lee, Sang-Gook KimVolume:
46
Year:
1999
Language:
english
Pages:
3
DOI:
10.1109/16.772496
File:
PDF, 282 KB
english, 1999