Kinetics of copper drift in low-κ polymer interlevel dielectrics
Loke, A.L.S., Wetzel, J.T., Townsend, P.H., Tanabe, T., Vrtis, R.N., Zussman, M.P., Kumar, D., Ryu, C., Wong, S.S.Volume:
46
Year:
1999
Language:
english
Pages:
10
DOI:
10.1109/16.796294
File:
PDF, 515 KB
english, 1999