A spacer patterning technology for nanoscale CMOS

IEEE Transactions on Electron Devices 2002 Vol. 49; Iss. 3

A spacer patterning technology for nanoscale CMOS

Yang-Kyu Choi, Tsu-Jae King, Chenming Hu
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Volume:
49
Year:
2002
Language:
english
Pages:
6
DOI:
10.1109/16.987114
File:
PDF, 298 KB
english, 2002
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