Ellipsometry measurements on refractive index profiles of...

IEEE Transactions on Instrumentation and Measurement 1990 Vol. 39; Iss. 4

Ellipsometry measurements on refractive index profiles of thin films

Jau Hwang Ho, Chung Len Lee, Tan Fu Lei
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Volume:
39
Year:
1990
Language:
english
Pages:
7
DOI:
10.1109/19.57248
File:
PDF, 656 KB
english, 1990
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