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A comparative study of CoZrNb and NiFe targets in discharge and sputtering using plasma confining type of magnetron sputtering method
Takahashi, T., Ikeda, N., Naoe, M.Volume:
26
Year:
1990
Language:
english
Pages:
3
DOI:
10.1109/20.104422
File:
PDF, 338 KB
english, 1990