Non-destructive AC permeability measurement of full wafer...

IEEE Transactions on Magnetics 1989 Vol. 25; Iss. 5

Non-destructive AC permeability measurement of full wafer soft magnetic films

Gieraltowski, J., Loaec, J., Le Gall, H.
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Volume:
25
Year:
1989
Language:
english
Pages:
3
DOI:
10.1109/20.42574
File:
PDF, 277 KB
english, 1989
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