Composition change in magnetron-sputtered Fe-Zr-N film with erosion of Fe-Zr alloy target
Ichihara, K., Tateyama, K., Sakai, R., Ishigami, T.Volume:
33
Year:
1997
Language:
english
Pages:
5
DOI:
10.1109/20.649880
File:
PDF, 104 KB
english, 1997