From substrate to VLSI: investigation of hardened SIMOX...

IEEE Transactions on Nuclear Science 1988 Vol. 35; Iss. 6

From substrate to VLSI: investigation of hardened SIMOX without epitaxy, for dose, dose rate and SEU phenomena

Leray, J.L., Dupont-Nivet, E., Musseau, O., Coic, Y.M., Umbert, A., Lalande, P., Pere, J.F., Auberton-Herve, A.J., Bruel, M., Jaussaud, C., Margail, J., Giffard, B., Truche, R., Martin, F.
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Volume:
35
Year:
1988
Language:
english
Pages:
6
DOI:
10.1109/23.25464
File:
PDF, 546 KB
english, 1988
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