Plasma sheath electric field strengths above a grooved...

IEEE Transactions on Plasma Science 1999 Vol. 27; Iss. 1

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

Czarnetzki, U., Hebner, G.A., Luggenholscher, D., Dobele, H.F., Riley, M.E.
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Volume:
27
Year:
1999
Language:
english
Pages:
2
DOI:
10.1109/27.763042
File:
PDF, 666 KB
english, 1999
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