Two-dimensional modeling and simulation for dynamic sheath...

IEEE Transactions on Plasma Science 1999 Vol. 27; Iss. 3

Two-dimensional modeling and simulation for dynamic sheath expansion during plasma immersion ion implantation

Shu Qin, Yuanzhong Xhou, Chung Chan
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Volume:
27
Year:
1999
Language:
english
Pages:
6
DOI:
10.1109/27.774681
File:
PDF, 288 KB
english, 1999
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