Thermal noise and radiation pressure in MEMS Fabry-Perot tunable filters and lasers
Tucker, R.S., Baney, D.M., Sorin, W.V., Flory, C.A.Volume:
8
Year:
2002
Language:
english
Pages:
10
DOI:
10.1109/2944.991403
File:
PDF, 344 KB
english, 2002