Applications of SOI-based optical MEMS

Noell, W., Clerc, P.-A., Dellmann, L., Guldimann, B., Herzig, H.-P., Manzardo, O., Marxer, C.R., Weible, K.J., Dandliker, R., de Rooij, N.

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Volume:

Year:

2002

Language:

english

Pages:

DOI:

10.1109/2944.991410

File:

PDF, 618 KB

english, 2002

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