Excimer laser projection micromachining of polyimide thin films annealed at different temperatures
Xiang Zhang, Grigoropoulos, C.P., Krajnovich, D.J., Tam, A.C.Volume:
19
Year:
1996
Language:
english
Pages:
13
DOI:
10.1109/3476.558873
File:
PDF, 199 KB
english, 1996