![](/img/cover-not-exists.png)
Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMS
Hurst, K.M., Ansari, N., Roberts, C.B., Ashurst, W.R.Volume:
20
Year:
2011
Language:
english
Pages:
3
DOI:
10.1109/jmems.2011.2162494
File:
PDF, 306 KB
english, 2011