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Decoupled Surface Micromachined Gyroscope With Single-Point Suspension
Kulygin, A., Kirsch, C., Schwarz, P., Schmid, U., Seidel, H.Volume:
21
Year:
2012
Language:
english
Pages:
11
DOI:
10.1109/jmems.2011.2170816
File:
PDF, 2.25 MB
english, 2012