A 2 Degree-of-Freedom SOI-MEMS Translation Stage With Closed-Loop Positioning
Bonjin Koo, Xuemeng Zhang, Jingyan Dong, Salapaka, S.M., Ferreira, P.M.Volume:
21
Year:
2012
Language:
english
Pages:
10
DOI:
10.1109/jmems.2011.2174425
File:
PDF, 1.58 MB
english, 2012