MEMS Ring Resonators for Laserless AFM With Sub-nanoNewton...

Journal of Microelectromechanical Systems 2012 Vol. 21; Iss. 2

MEMS Ring Resonators for Laserless AFM With Sub-nanoNewton Force Resolution

Algre, E., Zhuang Xiong, Faucher, M., Walter, B., Buchaillot, L., Legrand, B.
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Volume:
21
Year:
2012
Language:
english
Pages:
13
DOI:
10.1109/jmems.2011.2179012
File:
PDF, 1.22 MB
english, 2012
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