Sidewall Adhesion and Sliding Contact Behavior of...

Journal of Microelectromechanical Systems 2012 Vol. 21; Iss. 2

Sidewall Adhesion and Sliding Contact Behavior of Polycrystalline Silicon Microdevices Operated in High Vacuum

Alsem, D.H., Hua Xiang, Ritchie, R.O., Komvopoulos, K.
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Volume:
21
Year:
2012
Language:
english
Pages:
11
DOI:
10.1109/jmems.2011.2180364
File:
PDF, 879 KB
english, 2012
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