Hydrogenated Amorphous Silicon Microstructuring for...

IEEE Photonics Journal 2011 Vol. 3; Iss. 6

Hydrogenated Amorphous Silicon Microstructuring for 0th-Order Polarization Elements at 1.0–1.1 Wavelength

Kampfe, T., Tonchev, S., Gomard, G., Seassal, C., Parriaux, O.
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Volume:
3
Year:
2011
Language:
english
Pages:
7
DOI:
10.1109/jphot.2011.2175444
File:
PDF, 1.15 MB
english, 2011
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