Low-temperature deposition of hafnium silicate gate...

IEEE Journal of Selected Topics in Quantum Electronics 2004 Vol. 10; Iss. 1

Low-temperature deposition of hafnium silicate gate dielectrics

Punchaipetch, P., Pant, G., Quevedo-Lopez, M.A., Yao, C., El-Bouanani, M., Kim, M.J., Wallace, R.M., Gnade, B.E.
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Volume:
10
Year:
2004
Language:
english
Pages:
12
DOI:
10.1109/jstqe.2004.824109
File:
PDF, 675 KB
english, 2004
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