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Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
Chuan Pu, Sangtae Park, Chu, P.B., Shi-Sheng Lee, Ming Tsai, Peale, D., Bonadeo, N.H., Brener, I.Volume:
10
Year:
2004
Language:
english
Pages:
6
DOI:
10.1109/jstqe.2004.828480
File:
PDF, 293 KB
english, 2004