![](/img/cover-not-exists.png)
Fabrication and Measurement of Low-Stress Polyimide Membrane for High-Resolution Variable Optical Attenuator
Su, G.-D.J., Yu-Wei Yeh, Chiu, C.-W.E., Chao-Hu Li, Tyng-Yow ChenVolume:
13
Year:
2007
Language:
english
Pages:
4
DOI:
10.1109/jstqe.2007.893270
File:
PDF, 249 KB
english, 2007