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Assembly of Micro-3-D Components on SOI Wafers Using Novel SU-8 Locking Mechanisms and Vertical One-Push Operation
Yi Chiu, Chang-Shiou Wu, Wei-Zhi Huang, Jhong-Wei WuVolume:
15
Year:
2009
Language:
english
Pages:
6
DOI:
10.1109/jstqe.2009.2018478
File:
PDF, 559 KB
english, 2009