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A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators
Chengkuo Lee, Fu-Li Hsiao, Kobayashi, T., Kah How Koh, Ramana, P.V., Wenfeng Xiang, Bin Yang, Chee Wei Tan, Pinjala, D.Volume:
15
Year:
2009
Language:
english
Pages:
8
DOI:
10.1109/jstqe.2009.2022959
File:
PDF, 645 KB
english, 2009