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Low Thermal Budget Monolithic Integration of Evanescent-Coupled Ge-on-SOI Photodetector on Si CMOS Platform
Kah-Wee Ang, Tsung-Yang Liow, Ming-Bin Yu, Qing Fang, Junfeng Song, Guo-Qiang Lo, Dim-Lee KwongVolume:
16
Year:
2010
Language:
english
Pages:
8
DOI:
10.1109/jstqe.2009.2025142
File:
PDF, 2.29 MB
english, 2010