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Visible and 1.54 m Emission From Amorphous Silicon Nitride Films by Reactive Cosputtering
Yerci, S., Rui Li, Kucheyev, S.O., van Buuren, T., Basu, S.N., Dal Negro, L.Volume:
16
Year:
2010
Language:
english
Pages:
10
DOI:
10.1109/jstqe.2009.2032516
File:
PDF, 2.04 MB
english, 2010