Fabrication of Highly Ordered Silicon Nanowire Arrays With Controllable Sidewall Profiles for Achieving Low-Surface Reflection
Yung-Jr Hung, San-Liang Lee, Thibeault, B.J., Coldren, L.A.Volume:
17
Year:
2011
Language:
english
Pages:
9
DOI:
10.1109/jstqe.2010.2068540
File:
PDF, 1.22 MB
english, 2011