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Variability Origins of Parasitic Resistance in FinFETs With Silicided Source/Drain
Matsukawa, T., Yongxun Liu, Endo, K., Tsukada, J., Ishikawa, Y., Yamauchi, H., O'uchi, S., Sakamoto, K., Masahara, M.Volume:
33
Year:
2012
Language:
english
Pages:
3
DOI:
10.1109/led.2012.2182755
File:
PDF, 344 KB
english, 2012