A Novel SONOS Memory With Recessed-Channel Poly-Si TFT via...

IEEE Electron Device Letters 2012 Vol. 33; Iss. 4

A Novel SONOS Memory With Recessed-Channel Poly-Si TFT via Excimer Laser Crystallization

I-Che Lee, Chun-Chien Tsai, Hsu-Hang Kuo, Po-Yu Yang, Chao-Lung Wang, Huang-Chung Cheng
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Volume:
33
Year:
2012
Language:
english
Pages:
3
DOI:
10.1109/led.2012.2185479
File:
PDF, 469 KB
english, 2012
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