Enhanced resolution for future fabrication

Fritze, M., Chen, C.K., Astolfi, D.K., Yost, D.R., Burns, J.A., Chang-Lee Chen, Gouker, P.M., Suntharalingam, V., Wyatt, P.W., Keast, C.L.

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Volume:

Year:

2003

Language:

english

Pages:

DOI:

10.1109/mcd.2003.1175107

File:

PDF, 622 KB

english, 2003

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