Using the MIS capacitor for doping profile measurements...

Using the MIS capacitor for doping profile measurements with minimal interface state error

Nicollian, E.H., Hanes, M.H., Brews, J.R.

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Volume:

Year:

1973

Language:

english

Pages:

DOI:

10.1109/t-ed.1973.17659

File:

PDF, 1.06 MB

english, 1973

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