A general simulator for VLSI lithography and etching...

A general simulator for VLSI lithography and etching processes: Part I—Application to projection lithography

Oldham, W.G., Nandgaonkar, S.N., Neureuther, A.R., O'Toole, M.

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Volume:

Year:

1979

Language:

english

Pages:

DOI:

10.1109/t-ed.1979.19482

File:

PDF, 791 KB

english, 1979

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