Two-dimensional nature of diffused layers and certain limitations in scaling-down coplanar structure
Iwai, H., Taniguchi, K., Konaka, M., Maeda, S., Nishi, Y.Volume:
29
Year:
1982
Language:
english
Pages:
6
DOI:
10.1109/t-ed.1982.20754
File:
PDF, 631 KB
english, 1982