IIB-1 Subhalf-micrometer MOSFET's fabricated using focused...

IEEE Transactions on Electron Devices 1984 Vol. 31; Iss. 12

IIB-1 Subhalf-micrometer MOSFET's fabricated using focused ion-beam lithography

Rensch, D.B., Chen, J.Y.
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Volume:
31
Year:
1984
Language:
english
Pages:
1
DOI:
10.1109/t-ed.1984.21832
File:
PDF, 164 KB
english, 1984
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