A submicrometer megabit DRAM process technology using...

IEEE Transactions on Electron Devices 1985 Vol. 32; Iss. 2

A submicrometer megabit DRAM process technology using trench capacitors

Nakajima, S., Minegishi, K., Miura, K., Morie, T., Kimizuka, M., Mano, T.
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Volume:
32
Year:
1985
Language:
english
Pages:
7
DOI:
10.1109/t-ed.1985.21931
File:
PDF, 923 KB
english, 1985
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