Scaling considerations and dielectric breakdown improvement of a corrugated capacitor cell for a future dRAM
Sunami, H., Kure, T., Yagi, K., Wada, Y., Yamaguchi, K., Miyazawa, H., Shimizu, S.Volume:
32
Year:
1985
Language:
english
Pages:
8
DOI:
10.1109/t-ed.1985.21942
File:
PDF, 741 KB
english, 1985