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Anomalous leakage current in LPCVD PolySilicon MOSFET's
Fossum, J.G., Ortiz-Conde, A., Shichijo, H., Banerjee, S.K.Volume:
32
Year:
1985
Language:
english
Pages:
7
DOI:
10.1109/t-ed.1985.22212
File:
PDF, 805 KB
english, 1985