Anomalous leakage current in LPCVD PolySilicon MOSFET's

Fossum, J.G., Ortiz-Conde, A., Shichijo, H., Banerjee, S.K.

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Volume:

Year:

1985

Language:

english

Pages:

DOI:

10.1109/t-ed.1985.22212

File:

PDF, 805 KB

english, 1985

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