On the parasitic capacitances of multilevel parallel...

IEEE Transactions on Electron Devices 1985 Vol. 32; Iss. 11

On the parasitic capacitances of multilevel parallel metallization lines

Taylor, C.D., Elkhouri, G.N., Wade, T.E.
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Volume:
32
Year:
1985
Language:
english
Pages:
7
DOI:
10.1109/t-ed.1985.22287
File:
PDF, 548 KB
english, 1985
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