Auto-calibrated potential map drawing equipment and its...

IEEE Transactions on Electron Devices 1986 Vol. 33; Iss. 2

Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices

Tamama, T., Kuji, N.
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Volume:
33
Year:
1986
Language:
english
Pages:
6
DOI:
10.1109/t-ed.1986.22464
File:
PDF, 615 KB
english, 1986
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