Design and characteristics of a lightly doped drain (LDD)...

IEEE Transactions on Electron Devices 1986 Vol. 33; Iss. 3

Design and characteristics of a lightly doped drain (LDD) device fabricated with self-aligned titanium disilicide

Fang-Shi J. Lai, Jack Yuan-Chen Sun, Dhong, S.H.
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Volume:
33
Year:
1986
Language:
english
Pages:
9
DOI:
10.1109/t-ed.1986.22493
File:
PDF, 1.14 MB
english, 1986
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