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Capacitance coefficients for VLSI multilevel metallization lines
Zhen-Qiu Ning, Dewilde, P.M., Neerhoff, F.L.Volume:
34
Year:
1987
Language:
english
Pages:
6
DOI:
10.1109/t-ed.1987.22975
File:
PDF, 604 KB
english, 1987