New collector undercut technique using a SiN sidewall for...

IEEE Transactions on Electron Devices 2002 Vol. 49; Iss. 6

New collector undercut technique using a SiN sidewall for low base contact resistance in InP/InGaAs SHBTs

Kyungho Lee, Daekyu Yu, Minchul Chung, Jongchan Kang, Bumman Kim
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Volume:
49
Year:
2002
Language:
english
Pages:
4
DOI:
10.1109/ted.2002.1003753
File:
PDF, 293 KB
english, 2002
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