An ultrathin vertical channel MOSFET for sub-100-nm...

IEEE Transactions on Electron Devices 2003 Vol. 50; Iss. 5

An ultrathin vertical channel MOSFET for sub-100-nm applications

Haitao Liu, Zhibin Xiong, Sin, J.K.O.
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Volume:
50
Year:
2003
Language:
english
Pages:
6
DOI:
10.1109/ted.2003.813243
File:
PDF, 622 KB
english, 2003
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