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A floating well method for exact capacitance-voltage measurement of nano technology
Hung-Der Su, Bi-Shiou Chiou, Shien-Yang Wu, Ming-Hsung Chang, Kuo-Hua Lee, Yung-Shun Chen, Chih-Ping Chao, Yee-Chaung See, Sun, J.Y.-C.Volume:
50
Year:
2003
Language:
english
Pages:
2
DOI:
10.1109/ted.2003.813329
File:
PDF, 229 KB
english, 2003